Dr. William D. Hinsberg
Owner at Columbia Hill Technical Consulting
SPIE Involvement:
Author
Publications (56)

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Polymers, Molecules, Printing, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist processing, Stochastic processes, Polymer thin films

Proceedings Article | 16 October 2017 Presentation
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Photons, Molecules, Electrons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Oxides, Lithography, Imaging systems, Polymers, Metals, Photons, Extreme ultraviolet, Extreme ultraviolet lithography, Systems modeling, Absorption

Proceedings Article | 27 March 2014 Paper
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Lithium, Polymers, Image processing, Ions, Reflectivity, Photoresist processing, Semiconducting wafers, Standards development, Image quality standards

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Glasses, Scanning electron microscopy, Photoresist materials, Extreme ultraviolet, Line edge roughness, Analog electronics, Photomicroscopy, Photoresist processing, Semiconducting wafers, Resist chemistry

Showing 5 of 56 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 15 September 1993

Conference Committee Involvement (3)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Advances in Resist Technology and Processing X
1 March 1993 | San Jose, CA, United States
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