Prof. William P. King
at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | April 1, 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Polymers, Polymer thin films, Lithography, Optical lithography, Atomic force microscope, Metrology, Scanning probe lithography, Silicon, In situ metrology, Silicon films

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Modulation, Polymers, Silicon, Manufacturing, Atomic force microscopy, Atomic force microscope, Polymer thin films

PROCEEDINGS ARTICLE | March 31, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Thin films, Lithography, Optical lithography, Polymers, Glasses, Crystals, Resistance, Atomic force microscopy, Atomic force microscope, Nanolithography

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Microelectromechanical systems, Lithography, Microfluidics, Microsystems, Etching, Polymers, Silicon, Manufacturing, Scanning electron microscopy, Semiconducting wafers

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