Mr. Bill Pierson
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Publications (28)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Mathematical modeling, Metrology, Data modeling, Scanners, Process control, High volume manufacturing, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Transparency, Optical lithography, Data modeling, Image processing, Inspection, Control systems, Scanning electron microscopy, Optical metrology, Process control, High volume manufacturing, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Optical lithography, Data modeling, Image processing, Scanners, Control systems, Zernike polynomials, Process control, High volume manufacturing, Semiconducting wafers, Yield improvement, Overlay metrology

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Optical parametric oscillators, Scanners, Error analysis, Control systems, Process control, High volume manufacturing, Semiconducting wafers, Yield improvement, Overlay metrology

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Mathematical modeling, Data modeling, Scanners, Zernike polynomials, Process control, Feedback control, Semiconducting wafers, Statistical modeling, Performance modeling, Overlay metrology

PROCEEDINGS ARTICLE | April 14, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Lithography, Statistical analysis, Visual analytics, Data modeling, Visualization, Scanners, Atomic force microscopy, Optical alignment, Semiconducting wafers, Data analysis

Showing 5 of 28 publications
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