Dr. William D. Sawyer
Senior Member of Technical Staff at Charles Stark Draper Lab Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 January 2006
Proc. SPIE. 6113, MEMS/MOEMS Components and Their Applications III
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Glasses, Silicon, Manufacturing, Gyroscopes, Semiconducting wafers, Wafer bonding, Surface micromachining

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