William A. Stanton
Sr. R&D Manager
SPIE Involvement:
Publications (8)

Proceedings Article | 26 May 2022 Presentation + Paper
Rainer Zimmermann, Luis Orbe, Bernd Küchler, Ji Li, Jim Burdorf, William Stanton, Tung-Yu Su, Remco Stoffer, Ulrich Klostermann, Wolfgang Demmerle
Proceedings Volume 12148, 1214809 (2022) https://doi.org/10.1117/12.2620724
KEYWORDS: Optical proximity correction, Photomasks, Waveguides, Photonic devices, Lithography, Line edge roughness, Stochastic processes, Photonics, Signal to noise ratio

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 90521B (2014) https://doi.org/10.1117/12.2046370
KEYWORDS: Photomasks, Lithography, Source mask optimization, Photovoltaics, Calibration, Lens design, Process modeling, Performance modeling, Neck, Directed self assembly

Proceedings Article | 18 April 2013 Paper
Peter Brooker, Michael Lee, Ezequiel Vidal Russel, Shimon Levi, Sylvain Berthiaume, William Stanton, Travis Brist
Proceedings Volume 8681, 868123 (2013) https://doi.org/10.1117/12.2014182
KEYWORDS: Scanning electron microscopy, Metrology, Manufacturing, Optical proximity correction, Semiconducting wafers, Data modeling, Reticles, Feature extraction, Dysprosium, Data analysis

Proceedings Article | 5 April 2012 Paper
Sylvain Berthiaume, Travis Brist, Peter Brooker, William Stanton, Brian Ward, Shimon Levi, Amit Siany
Proceedings Volume 8324, 83241W (2012) https://doi.org/10.1117/12.918083
KEYWORDS: Scanning electron microscopy, Metrology, Data modeling, Optical proximity correction, Electronic design automation, Semiconducting wafers, Manufacturing, Computer aided design, Photomasks, Critical dimension metrology

Proceedings Article | 15 March 2012 Paper
S. Sethi, William Stanton, Kevin Lucas, Jay Hiserote, Duck-Hyung Hur, Rooli Choi
Proceedings Volume 8327, 83270O (2012) https://doi.org/10.1117/12.918057
KEYWORDS: Source mask optimization, Optical proximity correction, Optimization (mathematics), Computational lithography, Resolution enhancement technologies, Atrial fibrillation, Lithography, Computing systems, Manufacturing, Process engineering

Showing 5 of 8 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top