Dr. Willie J. Perez
at Brewer Science Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Etching, Silicon, Reflectivity, Chemical vapor deposition, Photoresist materials, Thin film coatings, Semiconducting wafers, Yield improvement, Back end of line, Front end of line

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