Prof. Wim M. J. Coene
Director Research at ASML Netherlands BV
SPIE Involvement:
Publications (12)

Proceedings Article | 15 August 2023 Presentation + Paper
Tamar Cromwijk, Manashee Adhikary, Sander Konijnenberg, Wim Coene, Teus Tukker, Johannes de Boer, Stefan Witte, Arie den Boef
Proceedings Volume 12618, 126180Y (2023)
KEYWORDS: Digital holography, Overlay metrology, Aberration correction, Holography, Microscopy, Calibration, Pupil aberrations, Metrology, Semiconductors, Semiconducting wafers

Proceedings Article | 5 March 2021 Presentation
Proceedings Volume 11676, 116761C (2021)
KEYWORDS: High harmonic generation, Coherence imaging, X-rays, Ultrafast phenomena, Statistical analysis, Laser applications, Fiber lasers, Extreme ultraviolet

Proceedings Article | 20 September 2020 Presentation + Paper
Paolo Ansuinelli, Wim Coene, H. Urbach
Proceedings Volume 11517, 1151711 (2020)
KEYWORDS: Photomasks, Extreme ultraviolet, Inspection, Semiconducting wafers, Extreme ultraviolet lithography, Metrology, Silicon, Image resolution, Phase retrieval, Reflectivity

Proceedings Article | 3 September 2019 Paper
Paolo Ansuinelli, Wim Coene, Paul Urbach
Proceedings Volume 11089, 110892F (2019)
KEYWORDS: Phase retrieval, Extreme ultraviolet, Photomasks, Inspection, Nanostructures, Coherence imaging, Fourier transforms, Metrology

Proceedings Article | 26 June 2017 Paper
A. Konijnenberg, W. M. Coene, S. Pereira, H. Urbach
Proceedings Volume 10335, 103351I (2017)
KEYWORDS: Spatial light modulators, Visible radiation, Coherence imaging, Reconstruction algorithms, Phase retrieval, Computational imaging, X-ray imaging, Far-field diffraction

Showing 5 of 12 publications
Conference Committee Involvement (3)
Optical Measurement Systems for Industrial Inspection X
26 June 2017 | Munich, Germany
Optical Measurement Systems for Industrial Inspection IX
22 June 2015 | Munich, Germany
Optical Measurement Systems for Industrial Inspection VIII
13 May 2013 | Munich, Germany
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