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Dr. Wim Symens
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Publications (1)
Proceedings Article | 16 October 2017 Paper
Pellicle films supporting the ramp to HVM with EUV
P. J. van Zwol, M. Nasalevich, W. P. Voorthuijzen, E. Kurganova, A. Notenboom, D. Vles, M. Peter, W. Symens, A. J. M. Giesbers, J. H. Klootwijk, R. W. E. van de Kruijs, W. J. van der Zande
Proceedings Volume 10451, 104510O (2017) https://doi.org/10.1117/12.2280560
KEYWORDS: Extreme ultraviolet, Pellicles, High volume manufacturing, Infrared radiation, Manufacturing
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