Winfried M. Kaiser
VP Product Strategy at Carl Zeiss SMT GmbH
SPIE Involvement:
Conference Program Committee | Author
Publications (29)

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Mirrors, Optical lithography, Sensors, Scanners, Lens design, Printing, Projection systems, Extreme ultraviolet lithography, High volume manufacturing, Device simulation

Proceedings Article | 7 January 2021 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Optical lithography, Sensors, Scanners, Lens design, Buildings, Printing, Projection systems, Extreme ultraviolet lithography, High volume manufacturing, Device simulation

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Lithography, Mirrors, Metrology, Lithographic illumination, Projection systems, Light sources and illumination, Extreme ultraviolet, Extreme ultraviolet lithography, Optics manufacturing, EUV optics

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Scanners, Particles, Photoresist materials, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers, Optics manufacturing, Stochastic processes

Proceedings Article | 16 October 2019 Presentation
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Mirrors, Optical design, Lithographic illumination, Imaging systems, Scanners, Projection systems, Extreme ultraviolet, Extreme ultraviolet lithography, Double patterning technology, EUV optics

Showing 5 of 29 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 8 November 2000

Conference Committee Involvement (6)
International Conference on Extreme Ultraviolet Lithography 2021
26 September 2021 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2020
21 September 2020 | Online Only, California, United States
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2018
17 September 2018 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography
11 September 2017 | Monterey, California, United States
Showing 5 of 6 Conference Committees
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