Witold Rzodkiewicz
at Institute of Electron Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 April 2003
Proc. SPIE. 5064, Lightmetry 2002: Metrology and Testing Techniques Using Light
KEYWORDS: Oxides, Refractive index, Silica, Annealing, Interfaces, Silicon, Nitrogen, Refraction, Molybdenum, Semiconducting wafers

Proceedings Article | 10 August 2001
Proc. SPIE. 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light
KEYWORDS: Refractive index, Data modeling, Optical properties, Spectroscopy, Annealing, Interfaces, Silicon, Surface roughness, Scanning electron microscopy, Spectroscopic ellipsometry

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top