Wolf Staud
Sr. Product Marketing Manager at Applied Materials South East Asia Pte Ltd
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 26 May 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Lithography, Imaging systems, Scanners, Inspection, Image restoration, Image resolution, Photomasks, Semiconducting wafers, Airborne remote sensing, Defect inspection

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Wafer-level optics, Lithography, Data modeling, Scanners, Inspection, Image resolution, Photomasks, Optical proximity correction, Semiconducting wafers, Airborne remote sensing

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Visualization, Etching, Image processing, Error analysis, Image registration, Double patterning technology, Modulation transfer functions

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Logic, Optical lithography, Scanners, Photomasks, Double patterning technology, Optical proximity correction, Neodymium, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Lithography, Manufacturing, 3D modeling, Feature extraction, Printing, Photomasks, Double patterning technology, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Showing 5 of 20 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 6 December 2004

SPIE Conference Volume | 17 December 2003

Conference Committee Involvement (15)
Photomask Technology 2014
16 September 2014 | Monterey, California, United States
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
Photomask Technology
7 October 2008 | Monterey, California, United States
Photomask Technology
18 September 2007 | Monterey, California, United States
Showing 5 of 15 Conference Committees
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