Prof. Wolfgang Benecke
at Fraunhofer-Institut für Siliziumtechnologie
SPIE Involvement:
Conference Program Committee | Author
Publications (21)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Microelectromechanical systems, Actuators, Modeling, Mirrors, Scanners, Computing systems, Control systems, 3D modeling, Laser scanners, Finite element methods, Micromirrors, Systems modeling, Piezoelectric drives, Piezoelectric thin film actuators

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Actuators, Signal to noise ratio, Mirrors, Electronics, Ferroelectric materials, Sensors, Platinum, Micromirrors, Position sensors, Wheatstone bridges

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Ferroelectric materials, FT-IR spectroscopy, Doppler effect, Spectrometers, Silicon, Microopto electromechanical systems, Semiconducting wafers

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Microelectromechanical systems, Mirrors, Modulation, Electrodes, Scanners, High power lasers, Laser applications, Laser scanners, 3D scanning, Semiconducting wafers

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Actuators, Laser sources, Mirrors, Ferroelectric materials, Polarization, Silicon, Finite element methods, Micromirrors, Laser based displays, Electromagnetism

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mathematical modeling, Microelectromechanical systems, Sensors, Electrodes, Scanners, Laser scanners, Capacitance, Micromirrors, 3D scanning, Analog electronics

Showing 5 of 21 publications
Conference Committee Involvement (1)
Design, Test, Integration, and Packaging of MEMS/MOEMS
9 May 2000 | Paris, France
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