Dr. Wolfgang Vollrath
Chief Scientist at KLA-Tencor MIE GmbH
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | July 17, 2006
Proc. SPIE. 6342, International Optical Design Conference 2006
KEYWORDS: Confocal microscopy, Microscopes, Point spread functions, Refractive index, Deep ultraviolet, Microscopy, Luminescence, Manufacturing, Wavefronts, Objectives

PROCEEDINGS ARTICLE | August 19, 2005
Proc. SPIE. 5865, Tribute to Warren Smith: A Legacy in Lens Design and Optical Engineering
KEYWORDS: Semiconductors, Microscopes, Optical design, Metrology, Deep ultraviolet, Ultraviolet radiation, Microscopy, Objectives, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | June 16, 2005
Proc. SPIE. 5835, 21st European Mask and Lithography Conference
KEYWORDS: Refractive index, Deep ultraviolet, Water, Optical testing, Objectives, Photomasks, Critical dimension metrology, Halftones, Semiconducting wafers, Binary data

PROCEEDINGS ARTICLE | November 2, 2000
Proc. SPIE. 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
KEYWORDS: Wafer-level optics, Semiconductors, Confocal microscopy, Microscopes, Deep ultraviolet, Microscopy, Optical microscopy, Objectives, Semiconducting wafers, Photonic microstructures

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top