Won Sun Kim
Research Staff Member at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (5)

Proceedings Article | 23 September 2009 Paper
Proceedings Volume 7488, 74882S (2009) https://doi.org/10.1117/12.830032
KEYWORDS: Inspection, SRAF, Optical proximity correction, Artificial intelligence, Defect detection, Semiconducting wafers, Photomasks, Reticles, Model-based design, Image resolution

Proceedings Article | 23 September 2009 Paper
Proceedings Volume 7488, 74882Q (2009) https://doi.org/10.1117/12.830139
KEYWORDS: Inspection, Photomasks, SRAF, Lithography, Defect detection, Reticles, Semiconducting wafers, Image resolution, Image processing, Wafer inspection

Proceedings Article | 11 May 2009 Paper
Won-Sun Kim, Dong-Hoon Chung, Chan-Uk Jeon, HanKu Cho, William Huang, John Miller, Gregg Inderhees, Becky Pinto, Jiuk Hur, Kihun Park, Jay Han
Proceedings Volume 7379, 73791C (2009) https://doi.org/10.1117/12.824289
KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Wafer inspection, Reticles, SRAF, Optical proximity correction, Lithography, Contamination, Image resolution

Proceedings Article | 23 March 2009 Paper
Wonil Cho, Won-Sun Kim, Sung-Joon Sohn, Sunpyo Lee, Jihyeon Choi, Yonghoon Kim, HanKu Cho
Proceedings Volume 7272, 72721T (2009) https://doi.org/10.1117/12.814101
KEYWORDS: Inspection, Reticles, Double patterning technology, Defect detection, Critical dimension metrology, Ear, Semiconducting wafers, Photomasks, Defect inspection, Radon

Proceedings Article | 14 May 2007 Paper
Proceedings Volume 6607, 660717 (2007) https://doi.org/10.1117/12.728956
KEYWORDS: Inspection, Lamps, Photomasks, Deep ultraviolet, Defect detection, SRAF, Particles, Defect inspection, Manufacturing, Resolution enhancement technologies

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