Won-Tai Ki
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Manufacturing, Image quality, Photomasks, Optical proximity correction, SRAF, Critical dimension metrology, Optimization (mathematics), Semiconducting wafers, Tolerancing

Proceedings Article | 19 May 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Electron beam lithography, Dry etching, Computer simulations, Monte Carlo methods, Photomasks, Cadmium sulfide, Double patterning technology, Convolution, Forward error correction, Vestigial sideband modulation

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Statistical analysis, Data modeling, Error analysis, Neural networks, Photomasks, Artificial intelligence, Explosives, Data conversion, Statistical modeling, Neurons

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Semiconductors, Electronics, Manufacturing, Distributed computing, Photomasks, Optical proximity correction, Local area networks, Data centers, Network architectures, Resolution enhancement technologies

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Semiconductors, Lithography, Electronics, Photomasks, Computed tomography, Double patterning technology, Critical dimension metrology, Data conversion, Data centers, Resolution enhancement technologies

Proceedings Article | 5 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Data storage, Databases, Silver, Manufacturing, Computing systems, Distributed computing, Photomasks, Optical proximity correction, Data conversion, Resolution enhancement technologies

Showing 5 of 15 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top