Dr. Won-Young Chung
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 May 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Optical lithography, Calibration, Interfaces, Electron microscopes, 3D modeling, Scanning electron microscopy, Thermal modeling, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Semiconductors, Etching, Control systems, Process control, Logic devices, SRAF, Critical dimension metrology, Process modeling, Plasma, Instrument modeling

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