Dr. Won Mook Choi
at KAIST
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Lithography, Proteins, Optical lithography, Polymers, Capillaries, Ultraviolet radiation, Resistance, Scanning electron microscopy, Adsorption, Polymerization

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Fabrication, Lithography, Polymers, Ultraviolet radiation, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Microfabrication, Nanolithography, 3D microstructuring

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