Wonjae Jang
at ASML Korea Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Overlay metrology, Metrology, Front end of line, Yield improvement, Control systems, Scatterometry

Proceedings Article | 16 February 2017
Proc. SPIE. 10106, Integrated Optics: Devices, Materials, and Technologies XXI
KEYWORDS: Refractive index, Surface plasmons, Sensors, Liquid lenses, Liquids, Metals, Waveguides, Dielectrics, Interfaces, Modulation

Proceedings Article | 22 April 2016
Proc. SPIE. 9721, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XIII
KEYWORDS: Surface plasmons, Nanostructures, Sensors, Transmittance, Chemical analysis, Metals, Biosensing, Refractive index, Glucose, Light sources

Proceedings Article | 14 March 2016
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Photoresist materials, Optical lithography, Coating, Glasses, Oxygen, Plasma, Photoresist developing, Manufacturing, Metals, Photomasks, Lithography, Microlens array

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