Wonsuk Ahn
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 9 July 2015 Paper
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Optical lithography, Etching, Image processing, Chromium, Transmittance, Photomasks, Immersion lithography, Nanoimprint lithography, Semiconducting wafers, Phase shifts

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Etching, Quartz, Dry etching, Chromium, Electroluminescence, Photomasks, Nanoimprint lithography, Critical dimension metrology, Resolution enhancement technologies

SPIE Journal Paper | 1 January 2006
OE Vol. 45 Issue 01
KEYWORDS: Video, Video processing, Quality measurement, Image quality, Edge detection, Detection and tracking algorithms, Image processing, Optical engineering, Data modeling, Signal to noise ratio

Proceedings Article | 28 June 2005 Paper
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Wafer-level optics, Lithography, Etching, Quartz, Dry etching, Chemistry, Photomasks, Nanoimprint lithography, Fluorine, Semiconducting wafers

SPIE Journal Paper | 1 May 2004
OE Vol. 43 Issue 05
KEYWORDS: Image processing, Optical engineering, Video, Video compression, Video processing, Digital cameras, Optical filters, Signal processing, Image quality, Motion estimation

Showing 5 of 9 publications
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