Dr. Woo-Bin Song
at Univ of Minnesota
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 12, 2007
Proc. SPIE. 6464, MEMS/MOEMS Components and Their Applications IV
KEYWORDS: Infrared detectors, Microbolometers, Mirrors, Sensors, Interfaces, Resistance, Chromium, Plasma enhanced chemical vapor deposition, Convection, Absorption

PROCEEDINGS ARTICLE | August 30, 2004
Proc. SPIE. 5406, Infrared Technology and Applications XXX
KEYWORDS: Microbolometers, Optical lithography, Sensors, Etching, Silicon, Resistance, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Temperature metrology, Plasma

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