Dr. Woo Jin Bae
at Cornell Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 26, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Oxides, Electron beam lithography, Refractive index, Deep ultraviolet, Nanoparticles, Etching, Resistance, Photoresist materials, Hafnium, Photoresist developing

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Oxides, Refractive index, Nanoparticles, Water, Particles, Dynamic light scattering, Immersion lithography, Hafnium, Fluid dynamics, Absorption

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Refractive index, Nanoparticles, Water, Ultraviolet radiation, Photoresist materials, Immersion lithography, Nanocomposites, Semiconducting wafers, Absorption

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