Dr. Woo-Yung Jung
at SK Hynix, Inc.
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 2 May 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Optical lithography, Particles, Distortion, Extreme ultraviolet lithography, Nanoimprint lithography, Optical alignment, Photoresist processing, Semiconducting wafers, Overlay metrology

Proceedings Article | 23 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Nanotechnology, Lithography, Etching, Manufacturing, Process control, Photomasks, Nanoimprint lithography, Critical dimension metrology, Line edge roughness, Photoresist processing

Proceedings Article | 21 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Optical lithography, Etching, Image processing, Ultraviolet radiation, Interfaces, Diffusion, Nanoimprint lithography, Photoresist processing, Liquids

Proceedings Article | 3 April 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Error analysis, Silicon, Distortion, Process control, Semiconductor manufacturing, Nanoimprint lithography, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Metrology, Optical lithography, Inspection, Scanning electron microscopy, Optical inspection, Scatterometry, Process control, Nanoimprint lithography, Semiconducting wafers

Showing 5 of 15 publications
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