Woong-Jae Chung
Staff Engineer at Infineon Technologies AG
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 March 2006
Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III
KEYWORDS: Semiconductors, Logic, Data storage, Control systems, Time metrology, Signal processing, Optical alignment, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization

Proceedings Article | 10 March 2006
Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III
KEYWORDS: Coherence (optics), Data modeling, Calibration, Diffusion, Optical proximity correction, Photoresist processing, Optical calibration, Statistical modeling, Model-based design, Process modeling

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