Prof. Wooshik Kim
at Sejong Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | October 14, 2016
OE Vol. 55 Issue 10
KEYWORDS: Phase retrieval, Diffraction, Defect detection, Photomasks, Fourier transforms, Inspection, Imaging systems, Extreme ultraviolet lithography, Reconstruction algorithms, Optical engineering

PROCEEDINGS ARTICLE | June 1, 2016
Proc. SPIE. 9867, Three-Dimensional Imaging, Visualization, and Display 2016
KEYWORDS: Diffraction, Coherence imaging, Defect detection, Imaging systems, Inspection, Fourier transforms, Phase retrieval, Photomasks, Extreme ultraviolet lithography, Phase measurement, Algorithm development, 3D image processing, Defect inspection

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