Dr. Woosung Han
President at SAMSUNG Austin Semiconductor LLC
SPIE Involvement:
Conference Chair | Symposium Chair | Conference Program Committee | Author
Publications (134)

SPIE Journal Paper | July 1, 2010
JM3 Vol. 9 Issue 03

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Semiconductors, Lithography, Metrology, Optical lithography, Data modeling, Scanners, Inspection, Optical alignment, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | December 12, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Reticles, Etching, Scanners, Inspection, Control systems, Optical proximity correction, Computer aided design, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | December 11, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Reticles, Optical lithography, Image segmentation, Scanners, Complex systems, Control systems, Distortion, Double patterning technology, Overlay metrology, Nonlinear control

SPIE Conference Volume | December 8, 2009

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

Showing 5 of 134 publications
Conference Committee Involvement (13)
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
Photomask Technology
18 September 2007 | Monterey, California, United States
Photomask and Next Generation Lithography Mask Technology XIV
17 April 2007 | Yokohama, Japan
Showing 5 of 13 published special sections
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