Dr. Woosung Han
President at SAMSUNG Austin Semiconductor LLC
SPIE Involvement:
Publications (133)

SPIE Journal Paper | 1 July 2010
JM3 Vol. 9 Issue 03

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Semiconductors, Lithography, Metrology, Optical lithography, Data modeling, Scanners, Inspection, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 12 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Reticles, Etching, Scanners, Inspection, Control systems, Optical proximity correction, Computer aided design, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 11 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Reticles, Optical lithography, Image segmentation, Scanners, Complex systems, Control systems, Distortion, Double patterning technology, Overlay metrology, Nonlinear control

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

Showing 5 of 133 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 8 December 2009

Conference Committee Involvement (13)
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
Photomask Technology
18 September 2007 | Monterey, California, United States
Photomask and Next Generation Lithography Mask Technology XIV
17 April 2007 | Yokohama, Japan
Showing 5 of 13 Conference Committees
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