Dr. Wu-Song Huang
Senior Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 16 April 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Lithographic illumination, Polymers, Silicon, Chemistry, Photomasks, Reactive ion etching, Photoresist processing, Semiconducting wafers, Photoresist developing

Proceedings Article | 20 March 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Near infrared, Optical sensors, Sensors, Polymers, Metals, Coating, Reflectivity, Semiconducting wafers, Back end of line, Absorption

Proceedings Article | 19 March 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Polymers, Silicon, Reflectivity, Chromophores, Silicon films, Solids, Critical dimension metrology, Semiconducting wafers, Bottom antireflective coatings

Proceedings Article | 26 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Multilayers, Etching, Polymers, Silicon, Photoresist materials, Silicon films, Immersion lithography, Reactive ion etching, Anisotropic etching

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Carbon, Lithography, Optical lithography, Reflection, Etching, Polymers, Silicon, Reflectivity, Photoresist materials, Standards development

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Polymers, Image processing, Diffusion, Humidity, Immersion lithography, Photoresist processing, Standards development, 193nm lithography, Chemically amplified resists

Showing 5 of 40 publications
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