Xiaojing Su
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (24)

SPIE Journal Paper | 23 March 2021
JM3 Vol. 20 Issue 01

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Lithography, Convolutional neural networks, Data modeling, Sensors, Neural networks, Machine learning, Optics manufacturing, Yield improvement, Statistical modeling, Performance modeling

Proceedings Article | 20 September 2020 Poster + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Lithography, Deep ultraviolet, Manufacturing, Photomasks, Extreme ultraviolet lithography, Source mask optimization, Computational lithography, Nanoimprint lithography, Optimization (mathematics)

Proceedings Article | 20 September 2020 Presentation + Paper
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Lithography, Optical lithography, Manufacturing, Data processing, Photomasks, Immersion lithography, Source mask optimization, Overlay metrology, Standards development, Back end of line

Showing 5 of 24 publications
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