Mrs. Xue Li
at Semiconductor Manufacturing International Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Defect detection, Scanners, Inspection equipment, Defect inspection

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Oxides, Polishing, Data modeling, Calibration, Copper, Manufacturing, 3D modeling, Design for manufacturing, Transistors, Process modeling, Process engineering, Chemical mechanical planarization, Back end of line, Front end of line

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Optical lithography, Roads, Visualization, Manufacturing, Legal, Monte Carlo methods, Design for manufacturing, Acquisition tracking and pointing, Double patterning technology, Optical proximity correction, Resolution enhancement technologies, Design for manufacturability

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Roads, Diffusion, Manufacturing, Transistors, Semiconductor manufacturing, Physical phenomena, Analog electronics, Tolerancing, Device simulation, Design for manufacturability

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