Xabier Azkorra
Research Assistant at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Electrodes, Silicon, 3D modeling, Printing, Photomasks, Mask making, Semiconducting wafers, Charged-particle lithography, Device simulation

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