Mr. Xaver Thrun
at Qoniac GmbH
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Microfluidics, Polymers, Water, Particles, Silicon, Chemistry, Scanning electron microscopy, Photoresist materials, Plasma etching, Photoresist processing, Semiconducting wafers, Fluid dynamics, Mask cleaning, Plasma, Advanced cleaning techniques

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Electron beam lithography, Electron beams, Sensors, Metals, Image processing, Electrons, Inspection, Scanning electron microscopy, Wafer inspection, Semiconducting wafers, Tin, Defect inspection

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Photovoltaics, Point spread functions, Electron beams, Scattering, Calibration, Computer simulations, Cadmium sulfide, Critical dimension metrology, Algorithm development, Semiconducting wafers

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Wafer-level optics, Electron beam lithography, Electron beams, Etching, Metals, Photomasks, Optical alignment, Electron beam direct write lithography, Semiconducting wafers, Back end of line

PROCEEDINGS ARTICLE | October 17, 2014
Proc. SPIE. 9231, 30th European Mask and Lithography Conference
KEYWORDS: Semiconductors, Microfluidics, Metals, Water, Silicon, Chemistry, Photoresist materials, Photoresist processing, Fluid dynamics, Plasma

PROCEEDINGS ARTICLE | October 17, 2014
Proc. SPIE. 9231, 30th European Mask and Lithography Conference
KEYWORDS: Electron beam lithography, Electron beams, Etching, Metals, Scanning electron microscopy, Photomasks, Optical alignment, Electron beam direct write lithography, Semiconducting wafers, Back end of line

Showing 5 of 12 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top