Mr. Xavier Blasco
at Univ Autònoma de Barcelona
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 29, 2003
Proc. SPIE. 5118, Nanotechnology
KEYWORDS: Oxides, Capacitors, Silica, Dielectrics, Silicon, Atomic force microscopy, Microelectronics, Molybdenum, Semiconducting wafers, Oxidation

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