Xavier Blasco
at Univ Autònoma de Barcelona
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 April 2003
Proc. SPIE. 5118, Nanotechnology
KEYWORDS: Atomic force microscopy, Oxides, Molybdenum, Silicon, Dielectrics, Capacitors, Silica, Semiconducting wafers, Microelectronics, Oxidation

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