Taking the advantages of SOI rib waveguide, a compact and efficient SPR sensor based on SOI rib waveguide is proposed. Ribs and air trenches are formed by ICP deep etch on SOI wafer. Then, the metal film for SPR is sputtered on the sidewall of the air trench. A tunable laser and an optical power meter are used to test the sensor. The sensor with micron dimensions can be directly end face coupled with the single-mode fibers of the laser and the power meter. Resonance curves of water and milk are obtained. The sensitivity of the sensor can reach 1200nm/RIU.
A genetic algorithm is applied to optimize a taper between a large cross-section silicon-on-insulator (SOI) rib waveguide and a single-mode fiber to achieve an ultra-compact and highly efficient coupling structure. The coupling efficiency is taken as the objective function of the genetic algorithm in the taper optimization process. To apply the optimization algorithm, the taper is segmented into several sections. Three encoding forms and a two-step optimization strategy are adopted in the optimization process, resulting in a 10μm long taper with a coupling efficiency of 93.30% in quasi-TE mode at 1550nm. The characteristics of the optimized taper including the field profile, spectrum and fabrication tolerances in both horizontal and vertical directions are investigated via a three dimensional eigenmode expansion (EME) method, indicating that the optimized taper is compatible with the prevailing integrated circuit (IC) processing technology.
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