Xianchao Cheng
at European Synchrotron Radiation Facility
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX
KEYWORDS: Thin films, Multilayers, Silicon, Coating, Wavefront sensors, Chromium, Palladium, Thin film coatings, Semiconducting wafers, Temperature metrology

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