Xiang-Wen Xiong
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Lithography, Electron beams, Optical lithography, Sensors, Receivers, Photomasks, Optical alignment, Computer graphics, Semiconducting wafers, Overlay metrology

Proceedings Article | 29 January 2008
Proc. SPIE. 6829, Advanced Materials and Devices for Sensing and Imaging III
KEYWORDS: Metrology, Sensors, Manufacturing, Receivers, Electronic components, Optical metrology, Ion beams, Distance measurement, 3D metrology, 3D vision

Proceedings Article | 4 January 2008
Proc. SPIE. 6825, Lasers in Material Processing and Manufacturing III
KEYWORDS: Doppler effect, Laser processing, Materials processing, Manufacturing, Laser applications, Laser welding, Laser marking, Receivers, Laser cutting, Tolerancing

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