Xiang Liu
at
SPIE Involvement:
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Publications (1)

PROCEEDINGS ARTICLE | August 24, 2009
Proc. SPIE. 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
KEYWORDS: Microelectromechanical systems, Actuators, Diffraction, Silicon, Telecommunications, Laser spectroscopy, Deep reactive ion etching, Semiconducting wafers, Laser optics, Diffraction gratings

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