Dr. Xiangdong Xu Profile

Dr. Xiangdong Xu

at Univ of Electronic Science and Technology of China

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 2 September 2014 Paper

Paper

Effects of pulse frequency on the microstructure, composition and optical properties of pulsed dc reactively sputtered vanadium oxide thin films

Xiang Dong, Zhiming Wu, Yadong Jiang, Xiangdong Xu, He Yu, Deen Gu, Tao Wang

Proceedings Volume 9284, 928414 (2014) https://doi.org/10.1117/12.2067762

KEYWORDS: Vanadium, Sputter deposition, Thin films, Refractive index, Optical properties, Absorption, Oxides, Transmittance, Plasma, Power supplies

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Proceedings Article | 23 December 2013 Paper

Paper

Effect of duty cycle on the electrical and optical properties of VOx film deposited by pulsed reactive magnetron sputtering

Xiang Dong, Zhiming Wu, Xiangdong Xu, Xiongbang Wei, Yadong Jiang

Proceedings Volume 9043, 90430P (2013) https://doi.org/10.1117/12.2035356

KEYWORDS: Sputter deposition, Vanadium, Thin films, Oxides, Plasma, Crystals, Absorption, Temperature metrology, Oxygen, Refractive index

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Proceedings Article | 22 October 2010 Paper

Paper

Effect of temperature on the growth of vanadium oxide films deposited by DC reactive magnetron sputtering

Mingjun Du, Zhiming Wu, Zhenfei Luo, Xiangdong Xu, Junsheng Yu, Yadong Jiang

Proceedings Volume 7658, 76581Z (2010) https://doi.org/10.1117/12.865558

KEYWORDS: Vanadium, Oxides, Sputter deposition, FT-IR spectroscopy, Optics manufacturing, Optical testing, Optoelectronics, Optoelectronic devices, Image sensors, Sensors

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Proceedings Article | 11 March 2008 Paper

Paper

Influence of substrate temperature on the morphology and thermal resistance of vanadium oxide thin films

Xiongbang Wei, Zhiming Wu, Tao Wang, Xiangdong Xu, Jingjing Tang, Yadong Jiang

Proceedings Volume 6984, 69842K (2008) https://doi.org/10.1117/12.792154

KEYWORDS: Thin films, Resistance, Temperature metrology, Vanadium, Sputter deposition, Oxides, Atomic force microscopy, Thin film deposition, Scattering, Thin film devices

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Proceedings Article | 11 March 2008 Paper

Paper

Substrate effect on the growth and thermal electrical properties of vanadium oxide thin films

Xiongbang Wei, Zhiming Wu, Xiangdong Xu, Tao Wang, Jingjing Tang, Yadong Jiang

Proceedings Volume 6984, 69842J (2008) https://doi.org/10.1117/12.792139

KEYWORDS: Thin films, Glasses, Silicon, Vanadium, Resistance, Oxides, Crystals, Sputter deposition, Thin film deposition, Atomic force microscopy

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Proceedings Article | 4 January 2008 Paper

Paper

Simulation of optical surfaces and their PSD study

Shuyi Gan, Yinhe Bao, Yilin Hong, Xiangdong Xu, Ying Liu, Shaojun Fu

Proceedings Volume 6831, 68310G (2008) https://doi.org/10.1117/12.757332

KEYWORDS: Atomic force microscopy, Particles, Surface roughness, Spatial frequencies, Optical simulations, Optical components, Synchrotron technology, Mechanical engineering, Reflectivity, Scattering

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Proceedings Article | 4 January 2008 Paper

Paper

Reactive ion beam etching of multilayer diffraction gratings with SiO₂ as the top layer

Ying Liu, Xiangdong Xu, Yilin Hong, Dequan Xu, Shaojun Fu

Proceedings Volume 6832, 68322O (2008) https://doi.org/10.1117/12.758011

KEYWORDS: Silica, Etching, Photoresist materials, Diffraction gratings, Photomasks, Ion beams, Reactive ion etching, Multilayers, Holography, Scanning electron microscopy

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Proceedings Article | 4 January 2008 Paper

Paper

Amending the uniformity of ion beam current density profile

Xiaowei Zhou, Dequan Xu, Ying Liu, Xiangdong Xu, Shaojun Fu

Proceedings Volume 6832, 68322N (2008) https://doi.org/10.1117/12.757750

KEYWORDS: Ion beams, Ions, Etching, Microwave radiation, Optical components, Optical testing, Plasma, Argon, Distance measurement, Synchrotron radiation

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Proceedings Article | 4 January 2008 Paper

Paper

Fabrication of CoFe nanostructures by holographic lithography

Zijun Zhang, Xudi Wang, Ying Liu, Yuxian Guo, Yilin Hong, Xiangdong Xu, Shaojun Fu, Pengshou Xu, Jie Wang, Jianwang Cai

Proceedings Volume 6831, 68311B (2008) https://doi.org/10.1117/12.757524

KEYWORDS: Magnetism, Iron, Lithography, Nanostructures, Nanolithography, Oxygen, Cobalt, Tantalum, Gold, Etching

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Proceedings Article | 4 January 2008 Paper

Paper

Methods of controlling grooves profile and the duty cycle of gold transmission phase gratings

Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6832, 68322L (2008) https://doi.org/10.1117/12.757521

KEYWORDS: Gold, Photoresist materials, Photoresist developing, Ion beams, Chromium, Etching, Reflectivity, Holography, Diffraction gratings, Semiconducting wafers

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Proceedings Article | 27 November 2007 Paper

Paper

Comparative study of surface roughness with power spectral density and multifractal spectrum

Shuyi Gan, Qing Zhou, Yilin Hong, Xiangdong Xu, Ying Liu, Hongjun Zhou, Tonglin Huo, Shaojun Fu

Proceedings Volume 6723, 67232R (2007) https://doi.org/10.1117/12.783328

KEYWORDS: Surface roughness, Atomic force microscopy, Silicon, Spatial frequencies, Glasses, Data acquisition, Probability theory, Spectral data processing, Silica, Semiconducting wafers

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Proceedings Article | 21 November 2007 Paper

Paper

Optimizing the varied line-space grating with the curvature of grating substrate

Zhengkun Liu, Bin Liu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6724, 67241I (2007) https://doi.org/10.1117/12.782893

KEYWORDS: Holography, Spherical lenses, Fabrication, Mirrors, Lithography, Photoresist materials, Optics manufacturing, Wavefronts, Synchrotron radiation, Time metrology

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Proceedings Article | 21 November 2007 Paper

Paper

Study of magnetic nanostructures fabricated using laser interference lithography

Zijun Zhang, Yuxian Guo, Youmei Chen, Yin Liu, Xiangdong Xu, Shaojun Fu, Jie Wang, Pengshou Xu

Proceedings Volume 6724, 67241J (2007) https://doi.org/10.1117/12.782895

KEYWORDS: Magnetism, Lithography, Iron, Etching, Cobalt, Ion beams, Photoresist materials, X-ray magnetic circular dichroism, Tantalum, Sputter deposition

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Proceedings Article | 19 November 2007 Paper

Paper

Reactive ion beam etching of large-aperture multilayer diffraction gratings by radio frequency ion beam source

Ying Liu, Dequan Xu, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 6724, 67240K (2007) https://doi.org/10.1117/12.782520

KEYWORDS: Diffraction gratings, Ion beams, Etching, Diffraction, Reactive ion etching, Diffractive optical elements, Hybrid fiber optics, Laser systems engineering, Ions, Argon

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Proceedings Article | 14 November 2007 Paper

Paper

Design and fabrication of soft x-ray transmission phase gratings

Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6722, 67223R (2007) https://doi.org/10.1117/12.783542

KEYWORDS: Diffraction gratings, Diffraction, Gold, X-rays, Optical design, Ion beams, Etching, Interferometers, Holography, Synchrotron radiation

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Proceedings Article | 9 December 2005 Paper

Paper

Design and fabrication of soft X-ray blazed diffraction gratings

Ying Liu, Xin Tan, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 6024, 60242N (2005) https://doi.org/10.1117/12.666970

KEYWORDS: Diffraction gratings, Diffraction, Interferometers, X-rays, Ion beams, Holography, Etching, Optical design, X-ray diffraction, Double patterning technology

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Proceedings Article | 7 February 2005 Paper

Paper

VUV and soft x-ray diffraction grating fabrication by holographic ion beam etching

Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.576652

KEYWORDS: Holography, Etching, Ion beams, Diffraction gratings, Gold, Reactive ion etching, Fabrication, Oxygen, Photoresist materials, Vacuum ultraviolet

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Proceedings Article | 7 February 2005 Paper

Paper

Design of variable-line-space plane gratings with holographic recording

Jun Lou, Ying Liu, Shaojun Fu, Xiangdong Xu, Shiping He

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.573369

KEYWORDS: Holography, Optical design, Spherical lenses, Wavefronts, Genetic algorithms, Aspheric lenses, Position sensors, Synchrotron radiation, Optimization (mathematics), Geometrical optics

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Proceedings Article | 7 February 2005 Paper

Paper

Reactive ion beam etching of HfO2 film using Ar/CHF3 gas chemistries

Xudi Wang, Xiangdong Xu, Ying Liu, Yiling Hong, Shaojun Fu

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.573666

KEYWORDS: Etching, Hybrid fiber optics, Photoresist materials, Ions, Ion beams, Argon, Reactive ion etching, Plasma, Chemistry, Hafnium

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Proceedings Article | 7 February 2005 Paper

Paper

Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates

Ying Liu, Jun Lou, Kai Xiao, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.574391

KEYWORDS: Diffraction, Ronchi rulings, Etching, Diffraction gratings, Zone plates, Neodymium, Photoresist materials, X-rays, Ion beams, X-ray lithography

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Proceedings Article | 29 September 1999 Paper

Paper

Fabrication of self-supporting transmission gratings for plasma diagnostics

Xiangdong Xu, Yilin Hong, Yangchao Tian, Tonglin Huo, Hongjun Zhou, Xiaoming Tao, Shiping Jiang, Shaojun Fu

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363652

KEYWORDS: Photoresist developing, Etching, Gold, Holography, Photoresist materials, Ion beams, X-rays, Diffraction gratings, Lithography, Fabrication

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Proceedings Article | 11 December 1998 Paper

Paper

Fabrication and performance of etched multilayer x-ray optics

Zhanshan Wang, Yueying Ma, Jianlin Cao, Xingdan Chen, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 3448, (1998) https://doi.org/10.1117/12.332521

KEYWORDS: Multilayers, X-rays, X-ray optics, Zone plates, Etching, Diffraction gratings, X-ray diffraction, Mirrors, Sputter deposition, Holography

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Showing 5 of 22 publications

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