PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6831, Nanophotonics, Nanostructure, and Nanometrology II
KEYWORDS: Optical components, Spatial frequencies, Scattering, Particles, Reflectivity, Surface roughness, Atomic force microscopy, Optical simulations, Mechanical engineering, Synchrotron technology
The performance of a optical component is greatly dependent on its surfaces. There are many ways to measure and
evaluate a surface so far, but actually no one knows exactly what a "real" surface likes, and thus makes some
measurement unexplainable. This paper develops a way to construct various synthetic surfaces. Referred to actual AFM
measurement, regular or irregular surfaces can be created and studied. Bumps, scratches, granules, profile errors and
other construction elements can be added to form a very complicated virtual surface. The number, size and distribution
of these elements can be changed, and if necessary, the surface roughness can be controlled in a specialized range. As
these surfaces are created synthetically, we know exactly what construction these surface contain. The height data of
created virtual surfaces can be transferred into the file that AFM instrument can read and handle. As a typical example, a
very complicated surface is created step by step in this paper, and its PSD for each step are calculated. This process
mikes it very clear how the surface component element affect its PSD function, and is benefit to our better understanding
of real surface construction.
