Xianglu Dai
at Tsinghua Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9276, Optical Metrology and Inspection for Industrial Applications III
KEYWORDS: Fabrication, Lithography, Microscopes, Electron beam lithography, Electron beams, Holography, Optical lithography, Metals, Deflectometry, Nanoimprint lithography

SPIE Journal Paper | November 18, 2013
OE Vol. 52 Issue 11
KEYWORDS: Calibration, Microscopes, Fourier transforms, Scanning electron microscopy, Image processing, Optical engineering, Mechanics, Electron microscopes, Optical microscopes, Chemical species

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