Xiangyang Liu
at Shanghai Institute of Technical Physics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 13, 2015
Proc. SPIE. 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II
KEYWORDS: Microlens array, Sensors, Etching, Photoresist materials, Sapphire, Microlens, Finite element methods, Statistical modeling, Process modeling, Device simulation

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