Dr. Xiangyu Zhou Profile

Dr. Xiangyu Zhou

Sr. Staff R&D Engineer at Synopsys GmbH

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 16 October 2017 Paper

Rigorous simulation of EUV mask pellicle

Yulu Chen, Xiangyu Zhou, Ulrich Klostermann, Lei Sun, Obert Wood, Mariya Braylovska, Sajan Marokkey, Francis Goodwin

Proceedings Volume 10451, 104510S (2017) https://doi.org/10.1117/12.2280339

KEYWORDS: Pellicles, Photomasks, Extreme ultraviolet, Nanoimprint lithography, Extreme ultraviolet lithography, Transmittance, Temporal coherence, Particles, Nickel, High volume manufacturing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years