Prof. Xiangzhao Wang
Professor at Shanghai Institute of Optics And Fine Mechanics
SPIE Involvement:
Conference Program Committee | Author
Publications (83)

SPIE Journal Paper | 31 March 2020
OE Vol. 59 Issue 03
KEYWORDS: Wavefronts, Interferometry, Signal to noise ratio, Zernike polynomials, Optical engineering, Error analysis, Wavefront reconstruction, Reconstruction algorithms, Lithium, Dynamical systems

Proceedings Article | 18 December 2019
Proc. SPIE. 11337, AOPC 2019: Optical Spectroscopy and Imaging
KEYWORDS: Metals, Quantitative analysis, Deconvolution, Laser induced breakdown spectroscopy, Chemical elements, Plasma, Liquids, Lead

SPIE Journal Paper | 31 May 2019
OE Vol. 58 Issue 05
KEYWORDS: Axicons, Interferometers, Fizeau interferometers, Calibration, Error analysis, Optical engineering, Distance measurement, Interferometry, Phase shifts, Light sources

SPIE Journal Paper | 27 February 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Lithium, EUV optics, Mechanics

SPIE Journal Paper | 24 January 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Particle filters, Filtering (signal processing), Thermal modeling, Particles, Semiconducting wafers, Projection systems, Lithography, Photomasks, Data modeling, Calibration

Showing 5 of 83 publications
Conference Committee Involvement (5)
Optical Metrology and Inspection for Industrial Applications VII
11 October 2020 | Beijing, China
Optical Metrology and Inspection for Industrial Applications VI
21 October 2019 | Hangzhou, China
Optical Metrology and Inspection for Industrial Applications V
11 October 2018 | Beijing, China
Optical Metrology and Inspection for Industrial Applications IV
12 October 2016 | Beijing, China
Optical Metrology and Inspection for Industrial Applications III
9 October 2014 | Beijing, China
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