Dr. Xianzhong Chen
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 9, 2005
Proc. SPIE. 5635, Nanophotonics, Nanostructure, and Nanometrology
KEYWORDS: Lithography, Nanostructures, Optical lithography, Doppler effect, Polarization, Chemical species, Photons, Collimation, Photomasks, Nanolithography

PROCEEDINGS ARTICLE | December 8, 2004
Proc. SPIE. 5774, Fifth International Conference on Thin Film Physics and Applications
KEYWORDS: Lithography, Nanostructures, Monochromatic aberrations, Electronics, Chemical species, Chromium, Monte Carlo methods, Photomasks, Motion models, Nanolithography

PROCEEDINGS ARTICLE | December 8, 2004
Proc. SPIE. 5774, Fifth International Conference on Thin Film Physics and Applications
KEYWORDS: Optical lithography, Polarization, Imaging systems, Image quality, Wave propagation, Optical resolution, Photomasks, Image enhancement, Resolution enhancement technologies, Phase shifts

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