Xiao-Dong Yang
at Xiamen Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 November 2007
Proc. SPIE. 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Mathematical modeling, Ferroelectric materials, Sensors, Resistance, Control systems, Optical testing, Optical scanning, Bridges, Feedback control, Device simulation

Proceedings Article | 27 November 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Microelectromechanical systems, Sensors, Sputter deposition, Electrodes, Silicon, Optical testing, Photoresist materials, Capacitance, Photomasks, Semiconducting wafers

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