Dr. Xiao-dong Wang
at Institute of Semiconductors CAS
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 14 May 2012
OE Vol. 51 Issue 5
KEYWORDS: Femtosecond phenomena, Lithography, Photoresist materials, Silicon, Sapphire, Submicron lithography, Gallium nitride, Fabrication, Head, Absorption

Proceedings Article | 4 January 2008
Proc. SPIE. 6841, Solid State Lighting and Solar Energy Technologies
KEYWORDS: Light emitting diodes, Electrodes, Metals, Resistance, Optical coatings, Reflectivity, Monte Carlo methods, Solids, Transmittance, Blue light emitting diodes

Proceedings Article | 4 January 2008
Proc. SPIE. 6841, Solid State Lighting and Solar Energy Technologies
KEYWORDS: Reflectors, Antireflective coatings, Light emitting diodes, Electrodes, Dielectrics, Coating, Optical coatings, Reflectivity, Gallium nitride, High reflection coatings

Proceedings Article | 4 January 2008
Proc. SPIE. 6841, Solid State Lighting and Solar Energy Technologies
KEYWORDS: Light emitting diodes, Silica, Optical properties, Etching, Dry etching, Dielectrics, Ions, Gallium nitride, Plasma enhanced chemical vapor deposition, Plasma

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