Dr. Xiao Deng
Doctoral Candidate at Tongji Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Metrology, Calibration, Chemical species, Manufacturing, Chromium, Atomic force microscopy, Scanning electron microscopy, Laser stabilization, Atomic force microscope, Standards development

PROCEEDINGS ARTICLE | September 24, 2015
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Lithography, Nanostructures, Metrology, Chemical species, Chromium, Image analysis, Atomic force microscopy, Nanofabrication, Nanolithography, Standards development

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