Dr. Xiaofeng Peng
at Saint-Gobain Research (Shanghai) Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 November 2000
Proc. SPIE. 4086, Fourth International Conference on Thin Film Physics and Applications
KEYWORDS: Carbon, Thin films, FT-IR spectroscopy, Chemical species, Sputter deposition, Silicon, Raman spectroscopy, Silicon films, Silicon carbide, Absorption

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