Dr. Xiaohai Li
SPIE Involvement:
Publications (8)

Proceedings Article | 23 March 2020 Paper
Zachary Levinson, Yudhishthir Kandel, Yunqiang Zhang, Qiliang Yan, Makoto Miyagi, Xiaohai Li, Kevin Lucas
Proceedings Volume 11323, 1132324 (2020) https://doi.org/10.1117/12.2554099
KEYWORDS: Stochastic processes, Optical proximity correction, Extreme ultraviolet lithography, Data modeling, Critical dimension metrology, Calibration, Monte Carlo methods, Lithography, Failure analysis, Image processing

Proceedings Article | 13 March 2012 Paper
Chris Cork, Xiaohai Li, Stephen Jang
Proceedings Volume 8326, 83261U (2012) https://doi.org/10.1117/12.916623
KEYWORDS: Optical proximity correction, Lithographic illumination, Photomasks, Lithography, Surface conduction electron emitter displays, Neodymium, Extreme ultraviolet lithography, Scanners, Image resolution, Optical lithography

Proceedings Article | 23 March 2011 Paper
Yang Ping, Xiaohai Li, Stephen Jang, Denny Kwa, Yunqiang Zhang, Robert Lugg
Proceedings Volume 7973, 79732M (2011) https://doi.org/10.1117/12.879947
KEYWORDS: Optical proximity correction, Tolerancing, Lithography, Image segmentation, Critical dimension metrology, Photomasks, Lithographic illumination, Detection and tracking algorithms, Laser induced breakdown spectroscopy, Roads

Proceedings Article | 25 September 2010 Paper
Proceedings Volume 7823, 78233R (2010) https://doi.org/10.1117/12.867247
KEYWORDS: Optical proximity correction, Photomasks, Calibration, Manufacturing, Semiconducting wafers, Tolerancing, Diffraction, Image processing, Critical dimension metrology, Immersion lithography

Proceedings Article | 4 March 2010 Paper
Xiaohai Li, Yasushi Kojima, Hironobu Taoka, Akemi Moniwa, Matt St. John, Yang Ping, Randall Brown, Robert Lugg, Sooryong Lee
Proceedings Volume 7640, 76402O (2010) https://doi.org/10.1117/12.849904
KEYWORDS: Optical proximity correction, Lithography, Model-based design, Optical lithography, Process modeling, Roads, Lithographic illumination, Photomasks, Immersion lithography, Semiconductor manufacturing

Showing 5 of 8 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top