Ms. Xiaohua Liu Profile

Xiaohua Liu

at Beijing Institute of Technology

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Author

Publications (2)

Proceedings Article | 6 January 2020 Paper

Xiaohua Liu, Tianfeng Zhou, Wenchen Zhou, Allen Yi, Zhiqiang Liang, Xibin Wang

Proceedings Volume 11383, 1138309 (2020) https://doi.org/10.1117/12.2523887

KEYWORDS: Silicon, Semiconducting wafers, Microlens array, Diamond, Microlens, Polishing, Particles, Surface finishing, Spindles, Control systems

Proceedings Article | 6 January 2020 Paper

Xiaohua Liu, Tianfeng Zhou, Wenchen Zhou, Allen Yi, Zhiqiang Liang, Xibin Wang

Proceedings Volume 11383, 1138309 (2020) https://doi.org/10.1117/12.2523887

KEYWORDS: Silicon, Semiconducting wafers, Microlens array, Diamond, Microlens, Polishing, Particles, Surface finishing, Spindles, Control systems

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